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兰州大学机构库  > 物理科学与技术学院  > 期刊论文
题名: Improving the Thermal Stability of Cu3N Films by Addition of Mn
作者: Fan, XY; Li, ZJ; Meng, A; Li, C; Wu, ZG; Yan, PX(闫鹏勋)
收录类别: SCIE ; EI ; CSCD
出版日期: 2015-08
刊名: JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
卷号: 31, 期号:8, 页码:822-827
出版者: JOURNAL MATER SCI TECHNOL
出版地: SHENYANG
英文摘要: Mn-doped Cu3N films were deposited by cylindrical magnetron sputtering equipment on the common glass at room temperature. The incorporation of Mn can change the preferred growth orientation from Cu-rich plane (111) to N-rich plane (100) due to the improvement of nitridation of Cu. The shrinkage of the lattice and the X-ray photoelectron spectroscopy results reveal that Mn should replace Cu atoms in the lattice or be segregated in the grain boundaries. The thickness of Mn-doped film is smaller than that of the pure one due to the less physisorption of N species among the columnar grains. The mean grain size and the energy gap become larger with increasing Mn concentration to 2.2 at.% and then decrease when the concentration of Mn is higher than 2.2 at.%. Notably, weak doping of 1.5 at.% Mn successfully promotes the decomposed temperature by similar to 50 degrees C. According to the results of XRD and SEM for Mn-doped films annealed in vacuum, a possible decomposed mechanism with increasing the annealing temperature is proposed. Copyright (C) 2015, The editorial office of Journal of Materials Science & Technology. Published by Elsevier Limited. All rights reserved.
关键词: Magnetron sputtering ; Cu3N film ; Mn-doped ; Thermal stability
作者部门: [Fan, Xiaoyan] Qingdao Univ Sci & Technol, Sch Math & Phys, Adv Optoelect Mat & Technol Engn Lab Qingdao, Qingdao 266061, Peoples R China ; [Li, Zhenjiang] Qingdao Univ Sci & Technol, Key Lab Polymer Mat Adv Mfg Technol Shandong Prov, Qingdao 266061, Peoples R China ; [Meng, Alan] Qingdao Univ Sci & Technol, Coll Chem & Mol Engn, Qingdao 266061, Peoples R China ; [Li, Chun] Ocean Univ China, Dept Phys, Qingdao 266100, Peoples R China ; [Wu, Zhiguo ; Yan, Pengxun] Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China
通讯作者: Li, C (reprint author), Ocean Univ China, Dept Phys, Qingdao 266100, Peoples R China.
学科分类: Materials Science; Metallurgy & Metallurgical Engineering
文章类型: Article
所属项目编号: Natural Science Foundation of Shandong Province [ZR2013EMQ006, ZR2011EMZ001, ZR2011EMQ011] ; National Natural Science Foundation of China [51272117, 51172115, 60907007] ; Research Award Fund for Outstanding Young Scientists of Shandong Province [BS2013CL040] ; Specialized Research Fund for the Doctoral Program of Higher Education of China [20123719110003] ; Tackling Key Program of Science and Technology in Shandong Province [2012GGX10218] ; Application Foundation Research Program of Qingdao [13-1-4-117-jch, 14-2-4-29-jch]
所属项目名称: 国家自然科学基金项目 ; 高等学校博士学科点专项科研基金
项目资助者: NSFC ; MOE
语种: 英语
DOI: 10.1016/j.jmst.2015.07.013
ISSN号: 1005-0302
WOS记录号: WOS:000359495200007
CSCD记录号: CSCD:5495686
EI记录号: 20153101083490
IR记录号: WOS:000359495200007
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内容类型: 期刊论文
URI标识: http://ir.lzu.edu.cn/handle/262010/181291
Appears in Collections:物理科学与技术学院_期刊论文

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Recommended Citation:
Fan, XY,Li, ZJ,Meng, A,et al. Improving the Thermal Stability of Cu3N Films by Addition of Mn[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2015,31(8):822-827.
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