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题名: Synthesis of crystalline carbon nitride by chemical vapor deposition
作者: Zhang, Yafei; Li, HL(力虎林); Xue, Qunji
收录类别: EI
出版日期: 1996
会议名称: Proceedings of the 1995 Fall MRS Symposium
会议日期: November 27, 1995 - November 30, 1995
会议地点: Boston, MA, USA
英文摘要: Crystalline carbon nitride films have been synthesized in a rf plasma assisted hot filament chemical vapor deposition system. Large crystalline grains up to approximately 10 μm in size as well as film-like regions are observed in the morphology of the films. β-C3N4 with two groups of lattice parameters (one is consistent with the theoretical value and the other is 3% smaller) in the deposited films on polycrystalline Ni substrate has been revealed by x-ray diffraction spectrum (XRD). No Raman shift peaks have been found evidently by Raman scattering measurement, but some presently unknown diffraction peaks appeared in the XRD spectrum. It is proposed that there are possible unknown structures of crystalline C-N in the films. Heteroepitaxial growth of crystalline β-C3N4 has also been tried via a buffer layer of α-SiC on Si (100) substrate. The XRD pattern of a film show that there are only two main peaks at 2.79 angstroms and 1.87 angstroms corresponding to the (200) and (300) crystalline planes of the theoretical β-C3N4. The two main peaks indicate heteroepitaxial growth along the (100) direction of β-C3N4.
关键词: Nitrides ; Chemical vapor deposition ; Crystal orientation ; Epitaxial growth ; Grain size and shape ; Lattice constants ; Morphology ; Plasma applications ; Polycrystalline materials ; Raman spectroscopy ; Silicon carbide ; Synthesis (chemical) ; X ray crystallography ; Carbon nitride ; Heteroepitaxial growth
作者部门: (1) Lanzhou Univ, Lanzhou, China
通讯作者: Zhang, Yafei
学科分类: Chemical Reactions;Inorganic Compounds;Physical Properties of Gases, Liquids and Solids;Plasma Physics;Crystalline Solids
会议录: Materials Research Society Symposium - Proceedings
卷号: 410
页码: 317-322
出版者: Materials Research Soc
出版地: Pittsburgh
语种: 英语
ISSN号: 0272-9172
EI记录号: 1996443327535
IR记录号: 1996443327535
第一机构:
内容类型: 会议论文
URI标识: http://ir.lzu.edu.cn/handle/262010/182835
Appears in Collections:学院待认领_会议论文

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Recommended Citation:
Zhang, Yafei,Li, Hulin,Xue, Qunji. Synthesis of crystalline carbon nitride by chemical vapor deposition[C]. 见:Proceedings of the 1995 Fall MRS Symposium. Boston, MA, USA. November 27, 1995 - November 30, 1995.
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