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摩擦学学报 [1]
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中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究
期刊论文
摩擦学学报, 2008, 卷号: 28, 期号: 2, 页码: 118-122
Authors:
张广安
;
王鹏
;
陈友明
;
王霞
;
闫鹏勋
;
张俊彦
;
Zhang, G.-A.
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Submit date：2015/04/27
中频磁控溅射
Al-DLC薄膜
摩擦磨损性能
Aluminum containing diamond like carbon (Al-DLC) thin films
Medium frequency magnetron sputtering
Tribological properties
