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半导体学报 [1]
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稀土掺杂宽带隙氮化物半导体薄膜的制备与性能研究
学位论文
博士, 兰州: 兰州大学, 2009
Authors:
张振兴
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View/Download:8/0
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Submit date:2019/01/18
氮化镓
氮化锌
溅射
稀土掺杂
发光机制
Influence of Substrate Temperature and Nitrogen Gas on Zinc Nitride Thin Films Prepared by RF Reactive Sputtering
期刊论文
半导体学报, 2007, 卷号: 28, 期号: 8, 页码: 1173-1178
Authors:
Zhang J(张军)
;
Xie EQ(谢二庆)
;
Fu YJ(付玉军)
;
Li H(李晖)
;
Shao LX(邵乐喜)
;
Zhang, J.
Adobe PDF(438Kb)
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View/Download:61/0
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Submit date:2015/04/28
氮化锌
薄膜
射频溅射
光电性质
Composition
Hall measurements
Nitrogen gas
Optical transmission spectra
Radio frequency (RF) magnetron sputtering
Substrate temperature
Zinc nitride