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Effects of the distance between the inductance coil and substrates on the microstructure and optical properties of silicon films deposited by ICP-CVD
会议论文
PROCEEDING OF THE FOURTH INTERNATIONAL CONFERENCE ON SURFACE AND INTERFACE SCIENCE AND ENGINEERING, Lanzhou, PEOPLES R CHINA, 2009
Authors:
Wang, JX
;
Qin, YL
;
Yan, HQ
;
Gao, PQ
;
Li, JS(栗军帅)
;
Yin, M(尹旻)
;
He, DY(贺德衍)
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/07/31
Gas-phase transport
Microstructure
Inductively coupled plasma CVD
Raman spectroscopy
Scanning electron microscope
Optical band gap
The effect of Ar flow rate in the growth of SiGe:H thin films by PECVD
期刊论文
APPLIED SURFACE SCIENCE, 2010, 卷号: 256, 期号: 23, 页码: 7032-7036
Authors:
Tang, ZG
;
Wang, WB
;
Wang, DS
;
Liu, DQ
;
Liu, QM
;
Yin, M(尹旻)
;
He, DY(贺德衍)
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/05/25
SiGe:H thin films
PECVD
Ar diluted gas
Optoelectronic properties
Deposition and Growth Mechanism of Low-Temperature Crystalline Silicon Films on Inexpensive Substrates
会议论文
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, Incheon, SOUTH KOREA, SEP 28-OCT 02, 2008
Authors:
He, DY(贺德衍)
;
Yin, M(尹旻)
;
Wang, JX
;
Gao, PQ
;
Li, JS(栗军帅)
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
Adobe PDF(1464Kb)
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Submit date:2015/07/31
Low-temperature crystalline Si films
Inductively coupled plasma CVD
Al-induced crystallization growth
Inexpensive substrates
Low-temperature deposition of highly crystallized silicon films on Al-coated polyethylene napthalate by inductively coupled plasma CVD
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 卷号: 481, 期号: 1-2, 页码: 278-282
Authors:
Wang, JX
;
Gao, PQ
;
Yin, M(尹旻)
;
Qin, YL
;
Yan, HQ
;
Li, JS(栗军帅)
;
Peng, SL(彭尚龙)
;
He, DY(贺德衍)
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
Adobe PDF(767Kb)
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Submit date:2015/05/25
Crystalline silicon films
PEN substrates
Al layer
Raman spectroscopy
Scanning electron microscope
Inductively coupled plasma CVD
Columnar growth of crystalline silicon films on aluminium-coated glass by inductively coupled plasma CVD at room temperature
期刊论文
Chinese Physics B, 2009, 卷号: 18, 期号: 2, 页码: 773-777
Authors:
Wang, JX
;
Qin, YL
;
Yan, HQ
;
Gao, PQ
;
Li, JS(栗军帅)
;
Yin, M(尹旻)
;
He, DY(贺德衍)
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/05/25
surface structure
columnar growth
inductively coupled plasma CVD
crystalline silicon films
Synthesis and light emission of fine and straight Si nanowires
期刊论文
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2008, 卷号: 10, 期号: 12, 页码: 3450-3453
Authors:
Wang, JX
;
Yan, HQ
;
Qin, YL
;
Gao, PQ
;
Li, JS(栗军帅)
;
Yin, M(尹旻)
;
Peng, SL(彭尚龙)
;
He, DY(贺德衍)
;
Wang, JX (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/05/25
Si nanowires
VLS
Chemical vapor deposition
HRTEM
Light emission
Highly crystallized silicon films grown on glass without amorphous incubation layers by inductively coupled plasma chemical vapor deposition
期刊论文
JOURNAL OF CRYSTAL GROWTH, 2008, 卷号: 310, 期号: 19, 页码: 4340-4344
Authors:
Li, JS(栗军帅)
;
Wang, JX
;
Yin, M(尹旻)
;
Gao, PQ
;
Chen, Q
;
Li, YL(李亚丽)
;
He, DY(贺德衍)
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/05/25
Deposition of controllable preferred orientation silicon films on glass by inductively coupled plasma chemical vapor deposition
期刊论文
JOURNAL OF APPLIED PHYSICS, 2008, 卷号: 103, 期号: 4, 页码: -
Authors:
Li, JS(栗军帅)
;
Wang, JX
;
Yin, M(尹旻)
;
Gao, PQ
;
He, DY(贺德衍)
;
Chen, Q
;
Li, YL(李亚丽)
;
Shirai, H
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/05/25
Study on the initial growth process of crystalline silicon films on aluminum-coated polyethylene napthalate by Raman spectroscopy
期刊论文
JOURNAL OF CRYSTAL GROWTH, 2007, 卷号: 308, 期号: 2, 页码: 330-333
Authors:
Li, JS(栗军帅)
;
Wang, JX
;
Yin, M(尹旻)
;
Gao, PQ
;
He, DY(贺德衍)
;
Chen, Q
;
Li, YL(李亚丽)
;
Shirai, H
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
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Submit date:2015/05/25
micro-structural characterization
plastic substrates
Raman spectroscopy
transmission electron microscopy
chemical vapor deposition processes
crystalline silicon films
Deposition and field emission properties of highly crystallized silicon films on aluminum-coated polyethylene napthalate
期刊论文
JOURNAL OF CRYSTAL GROWTH, 2007, 卷号: 306, 期号: 1, 页码: 1-5
Authors:
Li, JS(栗军帅)
;
Wang, JX
;
Yin, M(尹旻)
;
Gao, PQ
;
He, DY(贺德衍)
;
Chen, Q
;
Shirai, H
;
He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
Adobe PDF(859Kb)
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Submit date:2015/05/25
atomic force microscopy
crystal morphology
surface structure
inductively coupled plasma CVD
Si films
field emission